Title:
Plasma deposition of amorphous silicon-based materials
Author:
Bruno, Giovanni.
ISBN:
9780121379407
Publication Information:
Boston : Academic Press, c1995.
Physical Description:
1 online resource (xi, 324 p.) : ill.
Series:
Plasma--materials interactions
Series Title:
Plasma--materials interactions
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780121379407Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 256317-1001 | ONLINE | Searching... | Searching... |