Title:
Tribology in chemical-mechanical planarization
Author:
Liang, Hong.
ISBN:
9780824725679
Publication Information:
Boca Raton : Taylor & Francis, 2005.
Physical Description:
185 s. : şekl.
Added Author:
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | Book | 7.2/12/434666 | TJ1075 .L53 2005 | Searching... | Searching... |