Title:
Handbook of VLSI microlithography principles, technology, and applications
Author:
Glendinning, William B.
ISBN:
9780815512813
9781437728224
Publication Information:
Park Ridge, N.J., U.S.A. : Noyes Publications, ©1991.
Physical Description:
1 online resource (xxii, 649 pages) : illustrations.
Series:
Materials science and process technology series
Series Title:
Materials science and process technology series
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815512813Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 254921-1001 | ONLINE | Searching... | Searching... |