Electroceramic-Based MEMS Fabrication-Technology and Applications

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Title:

Author:

Setter, Nava. editor.

ISBN:

9780387233192

Physical Description:

XII, 414 p. online resource.

Series:

Electronic Materials: Science and Technology, 9

Series Title:

Electronic Materials: Science and Technology, 1386-3290 ; 9

Subject Term:

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Electronic Access:

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	164895-2001	ONLINE	Searching... Unknown	Searching... Unavailable