LIGA and its applications

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Title:

Author:

Saile, Volker.

ISBN:

9783527622573

Publication Information:

Weinheim : Wiley-VCH ; [Chichester : John Wiley, distributor], c2009.

Physical Description:

x, 479 p. : ill. ; 25 cm.

Series:

Advanced micro & nanosystems ; 7

Series Title:

Advanced micro & nanosystems ; 7

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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	303649-1001	ONLINE	Searching... Unknown	Searching... Unavailable