Cover image for Handbook of chemical vapor deposition (CVD) principles, technology, and applications
Title:
Handbook of chemical vapor deposition (CVD) principles, technology, and applications
Author:
Pierson, Hugh O.
ISBN:
9780815513001

9781437744880
Publication Information:
Park Ridge, N.J., U.S.A. : Noyes Publications, c1992.
Physical Description:
1 online resource (xxii, 436 p.) : ill.
Added Title:
Chemical vapor deposition.
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