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1. 
Cover image for Photonic MEMS devices design, fabrication and control
Photonic MEMS devices design, fabrication and control
Author 
Liu, Ai-Qun.
Preferred Shelf Number 
ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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Availability 
Online Library~1
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2. 
Cover image for LIGA and its applications
LIGA and its applications
Author 
Saile, Volker. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527622573
Format: 
Availability 
Online Library~1
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3. 
Cover image for Practical MEMS
Practical MEMS
Author 
Kaajakari, Ville.
Preferred Shelf Number 
TK7875 K33 2009
Format: 
Availability 
Beytepe Library~1
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