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Cover image for Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
Author 
Paik, Ungyu. Park, Jea-Gun.
Preferred Shelf Number 
TK7874.84
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9780429291890
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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2. 
Cover image for Tribology in chemical-mechanical planarization
Tribology in chemical-mechanical planarization
Author 
Liang, Hong, 1961, author. Craven, David R., 1945-
Preferred Shelf Number 
TJ1075 .L49 2005
Electronic Access 
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