Cover image for Microelectronic applications of chemical mechanical planarization
Title:
Microelectronic applications of chemical mechanical planarization
Author:
Li, Yuzhuo.
ISBN:
9780470180907
Publication Information:
Hoboken, N.J. : Wiley-Interscience, c2008.
Physical Description:
xxv, 734 p. : ill. ; 25 cm.
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