Cover; Title Page; Copyright; Dedication; Contents; Preface; Acknowledgments; Chapter 1 Introduction; 1.1 Micropositioning Techniques; 1.2 Compliant Guiding Mechanisms; 1.2.1 Basic Flexure Hinges; 1.2.2 Translational Flexure Hinges; 1.2.3 Translational Positioning Mechanisms; 1.2.4 Rotational Positioning Mechanisms; 1.2.5 Multi-Stroke Positioning Mechanisms; 1.3 Actuation and Sensing; 1.4 Control Issues; 1.5 Book Outline; References; Part I Large-Range Translational Micropositioning Systems; Chapter 2 Uniaxial Flexure Stage; 2.1 Concept of MCPF; 2.1.1 Limitation of Conventional Flexures

2.1.2 Proposal of MCPF2.2 Design of a Large-Range Flexure Stage; 2.2.1 Mechanism Design; 2.2.2 Analytical Modeling; 2.2.3 Architecture Optimization; 2.2.4 Structure Improvement; 2.3 Prototype Development and Performance Testings; 2.3.1 Statics Performance Testing; 2.3.2 Dynamics Performance Testing; 2.4 Sliding Mode Controller Design; 2.4.1 Dynamics Modeling; 2.4.2 DSMC Design; 2.5 Experimental Studies; 2.5.1 Plant Model Identification; 2.5.2 Controller Setup; 2.5.3 Set-Point Positioning Results; 2.5.4 Sinusoidal Positioning Results; 2.6 Conclusion; References; Chapter 3 XY Flexure Stage

3.1 Introduction3.2 XY Stage Design; 3.2.1 Decoupled XY Stage Design with MCPF; 3.2.2 Buckling/Bending Effect Consideration; 3.2.3 Actuation Issues; 3.3 Model Verification and Prototype Development; 3.3.1 Performance Assessment with FEA Simulation; 3.3.2 Prototype Fabrication; 3.3.3 Open-Loop Experimental Results; 3.4 EMPC Control Scheme Design; 3.4.1 Problem Formulation; 3.4.2 EMPC Scheme Design; 3.4.3 State Observer Design; 3.4.4 Tracking Error Analysis; 3.5 Simulation and Experimental Studies; 3.5.1 Plant Model Identification; 3.5.2 Controller Parameter Design

3.5.3 Simulation Studies and Discussion3.5.4 Experimental Results and Discussion; 3.6 Conclusion; References; Chapter 4 Two-Layer XY Flexure Stage; 4.1 Introduction; 4.2 Mechanism Design; 4.2.1 Design of a Two-Layer XY Stage with MCPF; 4.2.2 Structure Improvement of the XY Stage; 4.3 Parametric Design; 4.3.1 Motion Range Design; 4.3.2 Stiffness and Actuation Force Design; 4.3.3 Critical Load of Buckling; 4.3.4 Resonant Frequency; 4.3.5 Out-of-Plane Payload Capability; 4.3.6 Influences of Manufacturing Tolerance; 4.4 Experimental Studies and Results; 4.4.1 Prototype Development

4.4.2 Statics Performance Testing4.4.3 Dynamics Performance Testing; 4.4.4 Positioning Performance Testing; 4.4.5 Contouring Performance Testing; 4.4.6 Control Bandwidth Testing; 4.4.7 Discussion and Future Work; 4.5 Conclusion; References; Part II Multi-Stroke Translational Micropositioning Systems; Chapter 5 Dual-Stroke Uniaxial Flexure Stage; 5.1 Introduction; 5.2 Mechanism Design and Analysis; 5.2.1 Mechanism Design to Minimize Interference Behavior; 5.2.2 Mechanism Design to Achieve Large Stroke; 5.2.3 FEA Simulation and Design Improvement; 5.3 Prototype Development and Open-Loop Testing