Advances in chemical mechanical planarization (CMP)

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Title:

Author:

Babu, S. V., editor.

ISBN:

9780081002186

Physical Description:

1 online resource.

Series:

Woodhead publishing series in electronic and optical materials ; number 86

Woodhead Publishing series in electronic and optical materials ; no. 86.

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Electronic Access:

Holds:
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Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	458681-1001	ONLINE	Searching... Unknown	Searching... Unavailable