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1. 
Cover image for Polymers in microlithography : materials and processes
Polymers in microlithography : materials and processes
Author 
Reichmanis, Elsa, 1953-, ed. MacDonald, Scott A., ed. Iwayanagi, Takao, 1949-, ed. American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Preferred Shelf Number 
TK7871.15.P6 P635 1989
Format: 
Availability 
Beytepe Library~1
Available:
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2. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
Format: 
Availability 
Online Library~1
Available:
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