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1. 
Cover image for Mechanics of Microelectromechanical Systems
Mechanics of Microelectromechanical Systems
Author 
Lobontiu, Nicolae. author. Garcia, Ephrahim. author. SpringerLink (Online service)
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ONLINE
Electronic Access 
http://dx.doi.org/10.1007/b100026
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2. 
Cover image for Microscale Heat Transfer Fundamentals and Applications Proceedings of the NATO Advanced Study Institute on Microscale Heat Transfer — Fundamentals and Applications in Biological and Microelectromechanical Systems Cesme-Izmir, Turkey 18–30 July 2004
Microscale Heat Transfer Fundamentals and Applications Proceedings of the NATO Advanced Study Institute on Microscale Heat Transfer — Fundamentals and Applications in Biological and Microelectromechanical Systems Cesme-Izmir, Turkey 18–30 July 2004
Author 
Kakaç, S. editor. Vasiliev, L.L. editor. Bayazitoğlu, Y. editor. Yener, Y. editor. SpringerLink (Online service)
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http://dx.doi.org/10.1007/1-4020-3361-3
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3. 
Cover image for Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
Author 
Lyshevski, Sergey Edward.
Preferred Shelf Number 
TK7875 .L96 2005
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4. 
Cover image for Micro electro mechanical system design
Micro electro mechanical system design
Author 
Allen, James J.
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Distributed by publisher. Purchase or institutional license may be required for access.
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5. 
Cover image for Micro-optomechatronics
Micro-optomechatronics
Author 
Hosaka, Hiroshi, 1956-
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6. 
Cover image for CMOS-MEMS
CMOS-MEMS
Author 
Brand, Oliver, 1964- Fedder, G. K. (Gary K.) Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527616718
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7. 
Cover image for Analysis and design principles of MEMS devices
Analysis and design principles of MEMS devices
Author 
Bao, Min-Hang.
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ScienceDirect http://www.sciencedirect.com/science/book/9780444516169
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