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1. 
Cover image for Principles of MEMS
Principles of MEMS
Author 
Lee, Ki Bang.
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ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438
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2. 
Cover image for Introduction to microfabrication
Introduction to microfabrication
Author 
Franssila, Sami.
Preferred Shelf Number 
ONLINE
Electronic Access 
Click here for the electronic version.
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=589187
John Wiley http://dx.doi.org/10.1002/9781119990413
Books24x7 http://www.books24x7.com/marc.asp?bookid=43226
http://site.ebrary.com/lib/alltitles/Doc?id=10419414
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3. 
Cover image for Micromechanics and MEMS classic and seminal papers to 1990
Micromechanics and MEMS classic and seminal papers to 1990
Author 
Trimmer, W. Institute of Electrical and Electronics Engineers.
Preferred Shelf Number 
ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
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