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Polymers in microlithography : materials and processes

Author

Reichmanis, Elsa, 1953-, ed. MacDonald, Scott A., ed. Iwayanagi, Takao, 1949-, ed. American Chemical Society. Division of Polymeric Materials: Science and Engineering.

Preferred Shelf Number

TK7871.15.P6 P635 1989

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Beytepe Library~1

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Polymeric materials for microelectronic applications : science and technology

Author

Ito, Hiroshi, ed. Tagawa, Seichi, ed. Horie, Kazuyuki, 1941- Kåobunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group. American Chemical Society. Division of Polymeric Materials: Science and Engineering.

Preferred Shelf Number

TK 7871.15.P6 P59 1994

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Beytepe Library~2

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