Title:
Micro mechanical systems principles and technology
Author:
Fukuda, T. (Toshio), 1948-
ISBN:
9780444823632
Publication Information:
Amsterdam ; New York : Elsevier, 1998.
Physical Description:
1 online resource (viii, 268 p.) : ill.
Series:
Handbook of sensors and actuators ; v. 6
Series Title:
Handbook of sensors and actuators ; v. 6
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780444823632Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 254604-1001 | ONLINE | Searching... | Searching... |