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Title:
Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989. Vol. 2
Author:
International Conference on the Science and Technology of Defect Control in Semiconductors (1989 : Yokohama-shi, Japan)
ISBN:
9780444884299
Publication Information:
Amsterdam ; New York : North-Holland ; New York, N.Y., U.S.A. : Distributors for the U.S. and Canada, Elsevier Science Pub. Co., 1990.
Physical Description:
1 online resource : ill.
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780444884299Copies:
Available:*
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