Cover image for Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices
Title:
Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices
Author:
Paik, Ungyu.
ISBN:
9781420059137
Publication Information:
Boca Raton : Taylor & Francis, 2009.
Physical Description:
xiii, 191 p., [14] p. of plates : ill. (some col.).
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