Cover image for Dry etching for microelectronics
Title:
Dry etching for microelectronics
Author:
Powell, Ronald A.
ISBN:
9780444869050
Publication Information:
Amsterdam ; New York : North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co., 1984.
Physical Description:
1 online resource (xi, 299 pages) : illustrations.
Series:
Materials processing--theory and practices ; v. 4
Series Title:
Materials processing--theory and practices ; v. 4
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E-Book 256126-1001 ONLINE
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