Advances in CMP/polishing technologies for the manufacture of electronic devices

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Title:

Author:

Doi, Toshiro.

ISBN:

9781437778595

Edition:

1st ed.

Publication Information:

Oxford : William Andrew, 2012.

Physical Description:

1 online resource (xii, 317 p.)

Subject Term:

Added Author:

Electronic Access:

Holds:
Copies:

Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	146106-2001	ONLINE	Searching... Unknown	Searching... Unavailable