Title:
Dry etching for microelectronics
Author:
Powell, Ronald A.
ISBN:
9780444869050
Publication Information:
Amsterdam ; New York : North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co., 1984.
Physical Description:
1 online resource (xi, 299 pages) : illustrations.
Series:
Materials processing--theory and practices ; v. 4
Series Title:
Materials processing--theory and practices ; v. 4
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780444869050Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 256126-1001 | ONLINE | Searching... | Searching... |