Cover image for Rapid thermal processing science and technology
Title:
Rapid thermal processing science and technology
Author:
Fair, Richard B.
ISBN:
9780122476907
Publication Information:
Boston : Academic Press, c1993.
Physical Description:
1 online resource (viii, 430 p.) : ill.
Subject Term:
Semiconductors -- Heat treatment.

Semiconductor doping.

Rapid thermal processing.
Added Author:
Fair, Richard B.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780122476907
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