Cover image for Ätzverfahren für die Mikrotechnik
Title:
Ätzverfahren für die Mikrotechnik
Author:
Köhler, J. M. (J. Michael), 1956-
ISBN:
9783527288694

9783527602919
Publication Information:
Weinheim : Wiley-VCH, c1998.
Physical Description:
1 online resource (xvi, 398 p.) : ill.
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Electronic Access:
John Wiley http://dx.doi.org/10.1002/3527602917
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