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Title:
Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control
Author:
Mattox, D. M.
ISBN:
9780815514220
Publication Information:
Westwood, N.J. : Noyes Publications, c1998.
Physical Description:
1 online resource (xxvii, 917 p.) : ill.
Subject Term:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815514220Copies:
Available:*
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