Title:
Handbook of VLSI microlithography principles, technology, and applications
Author:
Helbert, John N.
ISBN:
9781591242758
9780815514442
9780815517795
Edition:
2nd ed.
Publication Information:
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., c2001.
Physical Description:
1 online resource (xxi, 1001 p.) : ill.
Series:
Materials science and process technology series. Electronic materials and process technology
Series Title:
Materials science and process technology series. Electronic materials and process technology
Genre:
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815514442Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 254148-1001 | ONLINE | Searching... | Searching... |