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1. 
Cover image for Fundamentals of semiconductor manufacturing and process control
Fundamentals of semiconductor manufacturing and process control
Author 
May, Gary S. Spanos, Costas J.
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ONLINE
Electronic Access 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952
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2. 
Cover image for Scientific wet process technology for innovative LSI/FPD manufacturing
Scientific wet process technology for innovative LSI/FPD manufacturing
Author 
Ohmi, Tadahiro, 1939-
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ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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3. 
Cover image for Handbook of semiconductor interconnection technology
Handbook of semiconductor interconnection technology
Author 
Schwartz, G. C. Srikrishnan, K. V., 1948-
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ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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