Cover image for Introductory MEMS Fabrication and Applications
Title:
Introductory MEMS Fabrication and Applications
Author:
Adams, Thomas M. author.
ISBN:
9780387095110
Edition:
1.
Physical Description:
XV, 444p. 50 illus., 25 illus. in color. online resource.
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E-Book 164671-2001 ONLINE
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