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1. 
Cover image for Tribology in chemical-mechanical planarization
Tribology in chemical-mechanical planarization
Author 
Liang, Hong. Craven, David.
Preferred Shelf Number 
TJ1075 .L53 2005
Format: 
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Beytepe Library~1
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2. 
Cover image for Tribology in chemical-mechanical planarization
Tribology in chemical-mechanical planarization
Author 
Liang, Hong, 1961- Craven, David R., 1945-
Preferred Shelf Number 
ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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Online Library~1
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3. 
Cover image for Chemical mechanical planarization of microelectronic materials
Chemical mechanical planarization of microelectronic materials
Author 
Steigerwald, Joseph M. Murarka, S. P. Gutmann, Ronald J. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527617746
Contributor biographical information http://catdir.loc.gov/catdir/bios/wiley041/96006198.html
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Online Library~1
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