Digital holography for MEMS and microsystem metrology

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Title:

Author:

Asundi, Anand.

ISBN:

9781119997290

9781119997306

Publication Information:

Chichester : Wiley, c2011.

Physical Description:

1 online resource (xxii, 205 p.)

Series:

Microsystem and nanotechnology series

Series Title:

Microsystem and nanotechnology series

Subject Term:

Added Author:

Electronic Access:

Holds:
Copies:

Library	Material Type	Item Barcode	Shelf Number	Status	Item Holds
Searching... Online Library	E-Book	305732-1001	ONLINE	Searching... Unknown	Searching... Unavailable