Title:
Plasma processing of semiconductors
Author:
Williams, P. Frazer, ed.
ISBN:
9780792345671
Publication Information:
Dordrecht : Kluwer Academic, 1997.
Physical Description:
x, 613 s.
Series:
NATO ASI Series. Series E : Applied Sciences - vol. 336
Series Title:
NATO ASI Series. Series E : Applied Sciences - vol. 336
General Note:
"Proocedings of the NATO Advanced Study Institute on Plasma... Chateau de Bonas, France, 17-28 June, 1996"
Added Author:
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | Book | 7.2/12/591797 | TA 2020 P532 1997 | Searching... | Searching... |
Searching... | Book | 7.2/12/591798 | TA 2020 P532 1997 | Searching... | Searching... |