
Title:
Laser microfabrication thin film processes and lithography
Author:
Ehrlich, Daniel J.
ISBN:
9780122334306
Publication Information:
Boston : Academic Press, c1989.
Physical Description:
1 online resource (xii, 587 p.) : ill.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306Copies: