Cover image for Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Title:
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Author:
Laconte, J. author.
ISBN:
9780387288437
Physical Description:
XIII, 292 p. online resource.
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E-Book 165572-2001 ONLINE
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