Cover image for Ionized physical vapor deposition
Title:
Ionized physical vapor deposition
Author:
Hopwood, Jeffrey A.
ISBN:
9780125330275
Publication Information:
San Diego : Academic Press, c2000.
Physical Description:
1 online resource (xii, 253 p.) : ill.
Series:
Thin films ; v. 27
Series Title:
Thin films ; v. 27
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