Title:
Micro process engineering fundamentals, devices, fabrication, and applications
Author:
Kockmann, Norbert.
ISBN:
9783527616961
9783527616749
Publication Information:
Weinheim : Wiley-VCH ; [Chichester : John Wiley [distributor]], c2006.
Physical Description:
1 online resource (xxii, 507 p.) : ill.
Series:
Advanced micro & nanosystems ; 5
Series Title:
Advanced micro & nanosystems ; 5
Added Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527616749Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0645/2006296404-b.html
Copies:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 303539-1001 | ONLINE | Searching... | Searching... |