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1. 
Cover image for Advances in CMP/polishing technologies for the manufacture of electronic devices
Advances in CMP/polishing technologies for the manufacture of electronic devices
Author 
Doi, Toshiro. Marinescu, Ioan D. Kurokawa, Syuhei.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9781437778595
Format: 
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Online Library~1
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2. 
Cover image for Handbook of lapping and polishing
Handbook of lapping and polishing
Author 
Marinescu, Ioan D. Uhlmann, Eckart. Doi, Toshiro K., 1947-
Preferred Shelf Number 
ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
Format: 
Availability 
Online Library~1
Available:
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