Title:
Plasma etching processes for CMOS device realization
Author:
Posseme, Nicolas, editor.
ISBN:
9780081011966
Physical Description:
1 online resource (x, 121 pages) : illustrations
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9781785480966Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 459350-1001 | ONLINE | Searching... | Searching... |