Cover image for Handbook of microlithography, micromachining, and microfabrication
Title:
Handbook of microlithography, micromachining, and microfabrication
Author:
Rai-Choudhury, P.
ISBN:
9780819423788

9780819423795
Publication Information:
Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, c1997.
Physical Description:
v.
Series:
IEE materials and devices series ; 12A-12B

IEE materials & devices series ; 12A-12B.
Contents:
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
Added Author:
Holds:
Copies:

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Book 7.2/18/28964 TK7836 H3423 1997 V.1
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Book 7.2/19/22845 TK7836 H3423 1997 V.2
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