
Title:
Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers
Author:
Reichel, Denise. author.
ISBN:
9783658113889
Edition:
1st ed. 2015.
Physical Description:
XXV, 112 p. 77 illus. in color. online resource.
Series:
MatWerk,
Contents:
Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing -- Concept of ripple pyrometry during flash lamp annealing -- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-3-658-11388-9Copies: