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1. 
Cover image for Handbook of silicon wafer cleaning technology
Handbook of silicon wafer cleaning technology
Author 
Reinhardt, Karen A. Kern, Werner, 1925-
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515548
Format: 
Availability 
Online Library~1
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2. 
Cover image for Handbook of cleaning in semiconductor manufacturing fundamentals and applications
Handbook of cleaning in semiconductor manufacturing fundamentals and applications
Author 
Reinhardt, Karen A. Reidy, Richard F. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
Wiley InterScience An electronic book accessible through the World Wide Web; click for information
Format: 
Availability 
Online Library~1
Available:

Copies: