Title:
Handbook of cleaning in semiconductor manufacturing fundamentals and applications
Author:
Reinhardt, Karen A.
ISBN:
9781118071748
Publication Information:
Salem : Scrivener ; Hoboken : John Wiley & Sons, Inc., c2011.
Physical Description:
xxii, 592 p.
Subject Term:
Added Author:
Added Corporate Author:
Electronic Access:
Wiley InterScience An electronic book accessible through the World Wide Web; click for informationCopies:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 303816-1001 | ONLINE | Searching... | Searching... |