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Cover image for Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Author 
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan) Hanaizumi, Osamu. Unno, Masafumi. Gunma Daigaku. International Education and Research Center for Silicon Science. Gunma Daigaku. Advanced Technology Research Center.
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ONLINE
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EBSCOhost http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=553111
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2. 
Cover image for Polymers for microelectronics : resists and dielectrics
Polymers for microelectronics : resists and dielectrics
Author 
Thompson, L. F., 1944- Willson, C. G. (C. Grant) 1939- Tagawa, Seiichi.
Preferred Shelf Number 
TK7871.15.P6 P65 1994
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Beytepe Library~1
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3. 
Cover image for Polymeric materials for microelectronic applications : science and technology
Polymeric materials for microelectronic applications : science and technology
Author 
Ito, Hiroshi, ed. Tagawa, Seichi, ed. Horie, Kazuyuki, 1941- Kåobunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group. American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Preferred Shelf Number 
TK 7871.15.P6 P59 1994
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Beytepe Library~2
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