Title:
Modeling of film deposition for microelectronic applications
Author:
Rossnagel, Stephen M.
ISBN:
9780125330220
Publication Information:
San Diego : Academic Press, c1996.
Physical Description:
1 online resource (xiv, 291 p.) : ill.
Series:
Thin films ; v. 22
Series Title:
Thin films ; v. 22
Subject Term:
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780125330220Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 256322-1001 | ONLINE | Searching... | Searching... |