Title:
Chemical mechanical planarization of microelectronic materials
Author:
Steigerwald, Joseph M.
ISBN:
9783527617746
Publication Information:
New York : J. Wiley, c1997.
Physical Description:
xiii, 324 p. : ill. ; 24 cm.
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527617746Contributor biographical information http://catdir.loc.gov/catdir/bios/wiley041/96006198.html
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 300816-1001 | ONLINE | Searching... | Searching... |