Title:
Silicon devices structures and processing
Author:
Jackson, Kenneth A.
ISBN:
9783527611805
Publication Information:
Weinheim ; Chichester : Wiley-VCH, c1998.
Physical Description:
202 p. : ill. ; 25 cm.
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Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527611805Copies: