Cover image for Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
Title:
Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
Author:
International Conference on Rapid Thermal Processing for Future Semiconductor Devices (2nd : 2001 : Ise-Shima, Mie, Japan)
ISBN:
9780444513397

9780080540269
Conference Author:
International Conference on Rapid Thermal Processing for Future Semiconductor Devices (2nd : 2001 : Ise-Shima, Mie, Japan)
Publication Information:
Amsterdam ; London : Elsevier, 2003.
Physical Description:
1 online resource (x, 150 p.) : ill.
Subject Term:
Semiconductors -- Heat treatment -- Congresses.

Rapid thermal processing -- Congresses.

Semiconductors -- Heat treatment -- Congresses. Rapid thermal processing -- Congresses.
Added Author:
Fukuda, Hisashi.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780444513397
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