Cover image for Materials science in microelectronics
Title:
Materials science in microelectronics
Author:
Machlin, E. S.
ISBN:
9780080444604
Edition:
2. bs.
Publication Information:
Amsterdam : Elsevier, c2005
Physical Description:
v. 1
Contents:
Vol 1. The relationships between thin film processing and structure.
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Copies:

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Book 7.2/12/593897 TK 7871.15.F5 M32 2005
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