Cover image for Micro process engineering fundamentals, devices, fabrication, and applications
Title:
Micro process engineering fundamentals, devices, fabrication, and applications
Author:
Kockmann, Norbert.
ISBN:
9783527616961

9783527616749
Publication Information:
Weinheim : Wiley-VCH ; [Chichester : John Wiley [distributor]], c2006.
Physical Description:
1 online resource (xxii, 507 p.) : ill.
Series:
Advanced micro & nanosystems ; 5
Series Title:
Advanced micro & nanosystems ; 5
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