Cover image for Optical inspection of microsystems
Title:
Optical inspection of microsystems
Author:
Osten, Wolfgang.
ISBN:
9781420019162
Publication Information:
Boca Raton, FL : CRC/Taylor & Francis, c2007.
Physical Description:
503 p., [8] p. of plates : ill. (some col.).
Series:
Optical science and engineering ; 109
Series Title:
Optical science and engineering ; 109
Subject Term:
Quality control -- Optical methods.

Optical detectors -- Industrial applications.

Microelectronics.
Added Author:
Osten, Wolfgang.
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