Title:
Handbook of silicon wafer cleaning technology
Author:
Reinhardt, Karen A.
ISBN:
9780815517733
9780815515548
9780815517719
Edition:
2nd ed.
Publication Information:
Norwich, NY : William Andrew, c2008.
Physical Description:
1 online resource (xxvi, 718 p.) : ill.
Series:
Materials science & process technology series
Series Title:
Materials science & process technology series
Subject Term:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815515548Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 145649-2001 | ONLINE | Searching... | Searching... |