Cover image for Handbook of physical vapor deposition (PVD) processing
Title:
Handbook of physical vapor deposition (PVD) processing
Author:
Mattox, D. M.
ISBN:
9780815520375

9780815520382
Edition:
2nd ed.
Publication Information:
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], c2010.
Physical Description:
1 online resource.
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